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J. Korean Ceram. Soc. > Volume 39(7); 2002 > Article
Journal of the Korean Ceramic Society 2002;39(7): 649.
doi: https://doi.org/10.4191/kcers.2002.39.7.649
Microcontact Printing을 이용한 미세패턴 ZnO 박막 제조
임예진, 윤기현1, 오영제
한국과학기술연구원 박막기술연구센터
1연세대학교 세라믹공학과
Preparation of in situ Patterned ZnO Thin Films by Microcontact Printing
In situ patterned zinc oxide thin films were prepared by precipitation of Zn(NO$_3$)$_2$ aqueous solution containing urea and by microcontact printing using Self-Assembled Monolayers(SAMs) on A1/SiO$_2$/Si substrates. The visible precipitation of Zn(OH)$_2$ that was formed in the Zn(NO$_3$)$_2$ aqueous solution containing urea was enhanced with an increase of the reaction temperature and the amount of urea. As the reaction time of Zn(NO$_3$)$_2$ with urea was prolonged, the thickness and grain size of Zn(OH)$_2$ thin layers were increased, respectively. The optimum precipitation condition was at 80$^{C}$ for 1 h for the solution with the ratio of Zn(NO$_3$)$_2$ to urea of 1 : 8. Homogeneous ZnO thin films were fabricated by the heat treatment of 600$^{C}$ for 1 h of Zn(OH)$_2$ precipitation on Al/SiO$_2$/Si substrate. This was available to the in-situ patterned ZnO thin films with uniform grain size. Hydrophobic SAM, Octadecylphosphonic Acid(OPA) and hydrophilic SAM, 2-Carboxyethylphosphonic Acid(CPA) were applied on the Al/SiO$_2$/Si substrate by microcontact printing method. In situ patterned ZnO thin film was successfully prepared by the heat treatment of Zn(OH)$_2$ precipitated on the surface of hydrophilic SAM, CPA.
Key words: Microcontact printing, Self-Assembled Monolayers, Precipitation, ZnO thin film, Selective deposition
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