| 압입법에 의한 실리콘의 상전이 |
| 김성순, 이홍림 |
| 연세대학교 세라믹공학과 |
| Phase Transformation of Silicon by Indentation |
| Sung-Soon Kim, Hong-Lim Lee |
| Department of Ceramic Engineering, Yonsei University |
|
|
|
|
|
| ABSTRACT |
|
Indentation was used to analyze high pressure phases of silicon. Phase transformations on both loading time and loading rate were studied. Micro-raman spectroscopy was used to observe the indentation-induced transformations. As the loading time increased, Si-III and Si-XII disappeared and only a-Si was observed in (111) samples. As the loading time increased, the residual stress was removed by creation of cracks or dislocations. At 0.1 mm/min loading rate, pop-in . At 5 mm/min loading rate pop-in was observed in force/displacement curve of (111) sample, but pop-in was not observed in force/displacement curve of (100) sample. This result indicates that the loading rate affects the volume of phase transformation in silicon. |
| Key words:
Indentation, Holding time, Loading rate, Pop-in |
|
|
|
PDF Links
Full text via DOI
Download Citation 
