| 과냉도 및 기판회전조건 변화에 따른 YIG 단결정 후막의 성장 |
| 김용탁, 윤석규, 김근영, 임영민1, 장현덕2, 윤대호 |
성균관대학교 신소재공학과
1전자부품연구원 광부품연구센터
2전자부품연구원 신뢰성평가센터 |
| Growth of YIG Thick Films by the Change of Supercooling and Substrate Rotation Speed |
| Yong-Tak Kim, Seok-Gyu Yoon, Geun-Young Kim, Young-Min Im1, Hyun-Duck Jang2, Dae-Ho Yoon |
Department of Advanced Materials Engineering, Sungkyunkwan University
1Optical Telecommunication Research Center, Korea Electronics Technology Institute
2Reliability and Failure Analysis Center, Korea Electronics Technology Institute |
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| ABSTRACT |
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Pure-yttrium iron garnet($Y_3Fe_5O_{12}$2, YIG) thick films were grown from a $PbO/B_2O_3$ flux onto (111) SGGG substrate using liquid phase epitaxy. The effect of substrate rotation speed and supercooling on crystallinity, chemical composition and growth rate of the thick films was investigated. The FWHM of films decreased with increasing of growth temperature from 860 to 910${circ}C$. A substrate rotation speed of 120 rpm at 910${circ}C$ lead to growth rates up to $60{mu}m/h$. |
| Key words:
YIG, Liquid phase epitaxy, Optical isolator |
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