PECVD법에 의한 3C-SiC막 증착(I): 증착변수에 따른 SiC 증착거동 |
김광호, 서지윤, 윤석영 |
부산대학교 무기재료공학과 |
Deposition of 3C-SiC Films by Plasma-enhanced Chemical Vapor Deposition (I): Deposition Behaviors of SiC with Deposition Parameters |
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Key words:
3C-SiC films, PECVD, Crystallinity, Free silicon |
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