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Journal of the Korean Ceramic Society
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J. Korean Ceram. Soc.
>
Volume 38(5); 2001
> Article
Journal of the Korean Ceramic Society 2001;38(5): 474.
유기금속화학증착법에 의한
$YMnO_3$
박막 제조 및 전기적 특성
김응수
, 노승현
, 김유택
, 강승구
, 심광보
1
경기대하교 재료공학과
1
한양대학교 세라믹공학과
Preparation and Electrical Properties of
$YMnO_3$
Thin Film by MOCVD Method
Key words:
FeRAM
,
Ferroelectric
,
MOCVD
,
$YMnO_3$
,
Grain size
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