Growing Behavior of AlN Thin Film Deposited by Asymmetric Bipolar Pulsed DC Reactive Sputtering

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J. Korean Ceram. Soc. > Volume 38(1); 2001 > Article

Journal of the Korean Ceramic Society 2001;38(1): 61.

비대칭 펄스 직류 반응성 스퍼터링으로 증착된 AlN 박막의 성장 거동

김주형, 이전국¹, 안진호²

한국과학기술연구원 박막기술연구센터, 한양대학교 재료공학과
¹한국과학기술연구원 박막기술연구센터
²한양대학교 재료공학과

Growing Behavior of AlN Thin Film Deposited by Asymmetric Bipolar Pulsed DC Reactive Sputtering

Key words: AlN, Pulsed dc, Arc, Duty cycle Pulse frequency

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