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Journal of the Korean Ceramic Society 2000;37(11): 1126. |
Crystallographic Relationships of (Ba, Sr) $TiO_3$Thin Film Prepared by Metal-Organic Chemical Vapor Deposition on (111) Textured Pt Electrode |
Dong-Chul Yoo, Jeong-Yong Lee |
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology |
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ABSTRACT |
The crystallographic orientations of $Ba_{0.6}$S $r_{0.4}$Ti $O_3$(BST) thin film deposited by a metal-organic chemical vapor deposition on (111) textured Pt electrode were studied with a transmission electron microscopy. The fully crystallized BST thin film (50nm) has (100) and (110) preferred orientations. A high resolution transmission electron microscopy study has revealed the crystallographic orientation relationships between BST thin film and Pt electrode. These relationships explained the preferred orientation of BST film on (111) textured Pt electrode. With these results, we could represent the atomic arrangement at the BST/Pt interface.e.e. |
Key words:
(Ba,Sr)$TiO_3$Transmission electron microscopy (TEM), Crystallographic orientation |
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