Synthesis and Crystallization of Fine SiC-<TEX>${Si_3}{N_4}$</TEX>Composite Powders by the Vapor Phase Reaction

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J. Korean Ceram. Soc. > Volume 37(11); 2000 > Article

Journal of the Korean Ceramic Society 2000;37(11): 1091.

기상반응에 의한 SiC-${Si_3}{N_4}$복합 분말의 제조 및 결정화

김형인, 최재문, 김석, 소명기

강원대학교 신소재공학과

Synthesis and Crystallization of Fine SiC-${Si_3}{N_4}$Composite Powders by the Vapor Phase Reaction

Key words: Ultrafine composite powder, $\alpha$-SiC, $\beta$-$Si_3$$N_4$, $\alpha$-${Si_3}{N_4, }$Chemical Vapor Deposition (CVD)

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