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Journal of the Korean Ceramic Society
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J. Korean Ceram. Soc.
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Volume 37(10); 2000
> Article
Journal of the Korean Ceramic Society 2000;37(10): 981.
Sol-Gel 공정을 이용한
$ErMnO_3$
박막 제조 및 전기적 특성
류재호
, 김유택
, 김응수
, 강승구
, 심광보
1
경기대학교 재료공학과
1
한양대학교 세라믹공학과
Preparation and Electrical Properties of
$ErMnO_3$
Thin Film Using Sol-Gel Process
Key words:
$ErMnO_3$
,
Sol-gel process
,
Leakage current
,
Preferred orientation
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