| ${MgCr_2}{O_4}$계 박막 습도센서의 감습 특성 |
| 편영미, 김태송1, 유광수 |
서울시립대학교 재료공학과
1한국과학기술원 박막기술연구센터 |
| Humidity-Sensitive Characteristics of ${MgCr_2}{O_4}$-Based Thin-Film Humidity Sensors |
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| ABSTRACT |
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Thin-film humidity sensor which TiO2, ZrO2, or CeO2 was added to MgCr2O4-based materials, respectively, were fabricated on the alumina substrate by using a resistant-heating evaporator. Thin films were approximately 2${mu}{textrm}{m}$ in grain size and shwoed porous microstructures. The resistance of the sensor decreased with increasing the relative humidity and the MgCr2O4-TiO2 sensor had the best humidity-sensing characteristics (linearity in relative humidity versus resistance). |
| Key words:
${MgCr_2}{O_4}$, Humidity sensor, Thin films |
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