Synthesis of Ultrafine Silicon Nitride Powders by the Vapor Phase Reaction

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J. Korean Ceram. Soc. > Volume 37(1); 2000 > Article

Journal of the Korean Ceramic Society 2000;37(1): 44.

기상반응에 의한 $Si_3N_4$ 미세분말의 합성

유용호, 어경훈, 소명기

강원대학교 재료공학과

Synthesis of Ultrafine Silicon Nitride Powders by the Vapor Phase Reaction

ABSTRACT

Silicon nitride powders, were synthesized by the vapor phase reaction using SiH4-NH3 gaseous mixture. The reaction temperature, ratio of NH3 to SiH4 gas and the overall gas quantity were varied. The synthesized powders were characterized using X-ray, TEM, FT-IR and EA. The synthesized silicon nitride powders were in amorphous state, and the average particle size was about 100nm. TEM analysis revealed that the particle size decreased with increasing reaction temperature and gas flow quantity. As-received amorphous powders were annealed in nitrogen atmosphere at 140$0^{circ}C$ for 2h, then the powders were completely crystallized at 0.2 ratio of NH3 to SiH4.

Key words: Vapor phase reaction of $Si_3N_4$ powder, $NH_3/SiH_4$ ratio, Reaction temperature, Crystallization