Fabrication of Borophosphosilicate Glass Thin Films for Optical Waveguides Using Aerosol Flame Deposition Method

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J. Korean Ceram. Soc. > Volume 37(1); 2000 > Article

Journal of the Korean Ceramic Society 2000;37(1): 77.

Aerosol Flame Deposition법을 이용한 광도파로용 Borophosphosilicate 유리박막의 제작에 관한 연구

이정우, 정형곤, 김병훈¹, 장현명², 문종하¹

전남대학교 물리학과
¹전남대학교 세라믹공학과
²포항공과대학 재료공학과

Fabrication of Borophosphosilicate Glass Thin Films for Optical Waveguides Using Aerosol Flame Deposition Method

ABSTRACT

Silica glass films to utilize optical waveguides was fabricated by Aerosol Flame Deposition(AFD) method. As the amount of B2O3 increased in the sol solution of (92-x)SiO2-xB2O3-8P2O5, the thermophoretic deposition rate onto Si substrate was markedly lowered due to vaporizing out of B2O3 and P2O5 during the vaporization and reaction of the aerosol in the flame. GeO2 was added to 62SiO2-30B2O3-8P2O5 in order to control easily the refractive index of glass films. As the amount of GeO2 increased from 2 to 12 wt%, its refractive index increased from 1.4633 up to 1.4716.

Key words: Borophosphosilicate glass thin films, Optical waveguides, AFD method