The Fabrication of Micro-framework Using Photosensitive Glass-ceramics

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J. Korean Ceram. Soc. > Volume 37(1); 2000 > Article

Journal of the Korean Ceramic Society 2000;37(1): 82.

감광성 결정화유리를 이용한 미세 구조물 제조에 대한 연구

김형준, 이상훈¹, 연석주², 최성철

한양대학교 세라믹공학과
¹대한광업진흥공사
²동신대학교 세라믹공학과

The Fabrication of Micro-framework Using Photosensitive Glass-ceramics

ABSTRACT

In lithium silicate photosensitive glass-ceramics, the relationship between lithography time and crystallization, and the effect of addition of mineral acid in etching rate and pattern shape were investigated. Irradiation times for micropatterning were less than 5 minutes in which Ce3+ ions in glass were changed rapidly to Ce4+ with ultra violet light. Overexposure to ultra brought about blot of pattern by diffiraction of light. Addition of mineral acid to HF enhanced etching rate as compared with HF solution only. The addition of H2SO4 especially increased the etching rate by 70%. But the mixed solution also increased the etching rate of the noncrystallized portion of the glass and this resulted in heavy etching. Etching with ultrasonic wave showed higher etching rate than that with the static or fluid method.

Key words: Photosensitive, Glass-ceramics, Micro-framework, Lithium silicate