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J. Korean Ceram. Soc. > Volume 36(8); 1999 > Article
Journal of the Korean Ceramic Society 1999;36(8): 813.
Ion Implantation으로 Ca를 첨가한 단결정 $Al_2$O$_3$의 Crck-Like Pore의 Healing 거동-H. Hexagonal Ligaments and Type of Healing
김배연
인천대학교 재료공학과
Effect of Ca Implantation on the Sintering and Crack Healing Behavior of High Purity $Al_2$O$_3$ Using Micro-Lithographic Technique -II. Hexagonal Ligaments and Type of Healing
ABSTRACT
Inner crack-like pores with controlled amount of Ca impurity level in the high purity alumina single crystal sapphire had been created by micro-fabrication technique which includes ion implantation photo-lithography Ar ion milling and hot press technique. The morphological change and the healing of crack-like pore in the Ca doped high purity single crystal alumina during high temperature heat treatment in vacuum were observed using optical microscopy. The hexagonal bridging ligaments were developed and the size of hexagonal bridging ligaments had been increased with temperature and Ca amount and had grown to their corner rounded. It appeared that the hexagonal bridging ligaments would have an equilbrium size with temperature and the amount of Ca addition. Three kinds of crack-like pore healing type were observed. Edge regression and ligament growth were observed from relatively low temperature in the crack-like pore. Edge regression were found in almost all of the crack-like pore but the ligament growth were found only in the several crack-like pores accelerating heating very fast. Flow type healing was observed above 180$0^{circ}C$ and It healed the crack-like pore very slowly
Key words: Alumina, Ca, Ion implantation, Crack Healing, Micro Lithorgaphy, Morphology, Ligaments
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