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J. Korean Ceram. Soc. > Volume 36(4); 1999 > Article
Journal of the Korean Ceramic Society 1999;36(4): 417.
화학기상증착 다이아몬드 막의 레이저 평탄화
박영준, 백영준
한국과학기술연구원 박막기술연구센터
Lapping of Chemical Vapor Deposited Diamond Films Using copper Vapor laser
Laser lapping of diamond films is performed with focused beam of copper vapor laser. Both spherical and rod-shape laser beam are used. Diamond surface is scanned at various scan speeds(0,125, 0.5, 0.75 mm/sec) and baem shifts (5, 10, 20, 40, 100$mutextrm{m}$) At 0.125 mm/sec 10$mutextrm{m}$ scan condition the level difference of di-amond surface of about 700$mutextrm{m}$ over 20 mm is reduced to 200$mutextrm{m}$ In addition surface roughness is also im-proved from 3.53$mutextrm{m}$ to 2.47$mutextrm{m}$ at 5$mutextrm{m}$ beam shift. But at higher beam shift than 10$mutextrm{m}$ laser scan makes the surface rougher which is considered to be due to the non uniform spatial distribution of laser en-ergy. It is concluded that homogenized laser beam with high average power is needed for large area laser lapping of diamond films at appreciable rates.
Key words: Laser lapping, Diamond films, Coper vapor laser
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