Dielectric and Pyroelectric Prooperties of (Ba,Sr)TiO<TEX>$_3$</TEX> Thin Films Grown by RF Magntron Sputtering

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J. Korean Ceram. Soc. > Volume 36(4); 1999 > Article

Journal of the Korean Ceramic Society 1999;36(4): 403.

RF 마그네트론 스퍼터링 방법으로 제조한 (Ba,Sr)TiO$_3$ 박막의 유전 및 초전특성

박재석, 김진섭¹, 이정희², 이용현², 한석룡³, 이재신

울산대학교 재료금속공학부
¹인제대학교 전자공학과
²경북대학교 전자전기공학부
³한국전자종합연구소

Dielectric and Pyroelectric Prooperties of (Ba,Sr)TiO$_3$ Thin Films Grown by RF Magntron Sputtering

ABSTRACT

The dielectric and pyroelectric properties of $Ba_{0.66}$$Sr_{0.38}$$TiO_{3}$(BST) thin films growtn on Pt/Ti/NON/Si us-ing RF magnetron sputtering have been investigated. With increasing the substrate temperature during de-position of the BST film in the range of 300-$600^{circ}C$ the dielectric and pyroelectric constants of the film were increased due to improved crystallinity of the film. In addition the dependence of the microstructural and electrical properties of BST films onthe deposition temperature of the bottom Pt electrode was studied. The preferred orientation of the BST films as well as the microstructure of the Pt film was greatly in-fluenced by the deposition temperature of the bottom Pt electrode was studied. The preferred orientation of the BSt films as well as the microstructure of the Pt film was greatly in-fluenced by the deposition temperature of the bottom Pt electrodes. and thus so were the pyrolelectric pro-perties of the BST film. The highest value of pyroelectric coefficient at room temperature obtained in this work was $nCcm^{-2}K^{-1}$ which is much higher than those previously reported on other perovskite fer-roelectric thin films.

Key words: Barium strontium titanate, Thin film, Proelectric property, Sputtering