Microstructure and Magnetic Characteristics of Yttrium Iron Garnet Thin Films Prepared by RF Magnetron Sputter

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J. Korean Ceram. Soc. > Volume 36(3); 1999 > Article

Journal of the Korean Ceramic Society 1999;36(3): 293.

고주파 마그네트론 스퍼터법에 의해 제조된 Yttrium Iron Garnet 박막의 미세구조 및 자기적 특성

박명범, 김병진, 조남희

인하대학교 무기 재료공학과

Microstructure and Magnetic Characteristics of Yttrium Iron Garnet Thin Films Prepared by RF Magnetron Sputter

Key words: YIG, Sputter, GGG, FMR

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