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J. Korean Ceram. Soc. > Volume 35(2); 1998 > Article
Journal of the Korean Ceramic Society 1998;35(2): 145.
ZnGa$_2$O$_4$ 박막형광체 성장에 관한 연구
정영호, 김영진
경기대학교 재료공학과
A Study on the Growth of ZnGa$_2$O$_4$ Thin Film Phosphors
ZnGa2O4 thin film phosphors were deposited on Si(100) (111) wafers by rf magnetron sputtering. The ef-fects of substrates and deposition parameters on the growing mechanisms were studied. As a results of the effect of substrate temperature tranistions of growth orientation and different growing behaviors were ob-served. Also polycrystalline ZnGa2O4 thin film could not be achieved without oxygen gas. PL spectrum of ZnGa2O4 thin films were analyzed and showed broad band luminescence spectrum.
Key words: ZnGa2O4, Spinel, Phosphor, Sputtering, Photoluminescence
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