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J. Korean Ceram. Soc. > Volume 34(5); 1997 > Article
Journal of the Korean Ceramic Society 1997;34(5): 512.
Ti-Al-N코팅층의 내산화 특성에 관한 연구
김충완, 김광호
부산대학교 무기재료공학과
Study on the Oxidation Resistance of Ti-Al-N Coating Layer
The high temperature oxidation behaviors of titanium nitride films prepared by PACVD technique were studied in the temperature range of from 50$0^{circ}C$ to 80$0^{circ}C$ under air atmosphere. Ti0.88Al0.12N film, which showed the excellent microhardness from the previous work, was investigated on its oxidation resistance compared with pure TiN film. Ti-Al-N film showed superior oxidation resistance up to $700^{circ}C$, whereas TiN film was fast oxidized into rutile TiO2 crystallites from at 50$0^{circ}C$. It was found that an amorphous layer having AlxTiyOz formula was formed on the surface region due to outward diffusion of Al ions at the initial stage of oxidation. The amorphous oxide layer played a role as a barrier against oxygen diffusion, protected the remained nitride layer from further oxidation, and thus, resulted in the high oxidation resistive characteristics of Ti-Al-N film.
Key words: Oxidation resistance, Ti-Al-N, PACVD
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