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J. Korean Ceram. Soc. > Volume 34(4); 1997 > Article
Journal of the Korean Ceramic Society 1997;34(4): 387.
증착방법에 따른 $NO_x$가스 감지용 $WO_3$박막센서의 특성 변화 연구
김태송, 김용범1, 유광수2, 성기숙1, 정형진
한국과학기술연구원 세라믹스부
1(주) 우영 기술연구소
The Sensing Characteristics of $WO_3$ Thin Films for $NO_x$ Gas Detection with the Change of Deposition Methods
In order to apply WO3 thin films to the semiconducting NOx gas sensors as a sensing material, which have been expected to show good electrical properties, such as large sensitivity, rapid responsibility, and high selectivity, the fabrication method and their sensing characteristics were studied. The variations of surface morphologies, crystallographic orientations and crystallinity with the WO3 thin film growing methods thermal evaporation and DC sputtering methods were investigated by using scanning electron microscopy (SEM) and X-ray diffraction(XRD) analysis. As a result of sensitivity (Rgas/Rair) measurements for the 5 ppm NO2 test gas, the sensitivity values were 113 for the sputtered films and 93 for the evaporated films. It was also observed that the recovery rate of a sensing signal after measuring sensitivity was faster in the sputtered films than in the evaporated films.
Key words: $WO_3$ films, $NO_x$ sensor, Evaporation, Sputtering, Gas sensor
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