소결시의 승온속도가 질화규소 요업체의 미세조직과 파괴인성에 미치는 영향 |
이상훈, 이재도, 김도연1 |
한국화학연구소 무기소재부 1서울대학교 무기재료공학과 |
Effect of the Heating Rate on the Microstructure and Fracture Toughness of Silicon Nitride Ceramics |
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ABSTRACT |
Effect of heating rate on the microstructure of the silicon nitride ceramics has been investigated. The specimens with composition of 92Si3N4-6Y2O3-2Al2O3 (in wt%) were sintered at 176$0^{circ}C$ under 127 kPa for 3h in N2 atmosphere at various heating rates from 1 to 10$0^{circ}C$/min. The grain size of larger than 2${mu}{textrm}{m}$ and less than 1${mu}{textrm}{m}$ were measured and compared for the specimens. Regardless of heating rate, grain size of all the specimens showed bimodal distributions and the fracture toughness remained in the range of 5.53~5.72 MPa.m1/2. However, the aspect ratio of the grains of diameter above 2${mu}{textrm}{m}$ increased with the heating rate while their grain size and volume fraction decreased. |
Key words:
Silicon nitride, Heating rate, Aspect ratio, Volume fraction, Fracture toughness |
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