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J. Korean Ceram. Soc. > Volume 32(4); 1995 > Article
Journal of the Korean Ceramic Society 1995;32(4): 516.
졸-겔법을 이용한 $(Ba_{1-x}Sr_x)TiO_3$ 박막의 제조 및 특성
황규석, 김병훈
전남대학교 공과대학 무기재료공학과
Preparation and Characteristics of $(Ba_{1-x}Sr_x)TiO_3$ Thin Films by the Sol-gel Process
In this study, to prepare the dielectric (Ba, Sr)TiO3 thin films by the sol-gel process, Titaminum (IV) sio-propoxide (Ti[OCH(CH3)2]4), Ba and Sr acetate were used for sol and thin films were prepared by dip-coating process. Stability of sol decreased with the increase of Sr, and thickness of thin films were obtained 0.13~0.17${mu}{textrm}{m}$ by 1 coating cycle. Transmittance of amorphous thin films heated at 500 and 55$0^{circ}C$ was very good, and crystallization tendency of thin films according to heat-treatment temperature and crystallization characteristics of thin films heated at 11$0^{circ}C$ for 3 hrs were analysed. As a result, good perovskite structure was obtained higher than 100$0^{circ}C$, and tetragonality of thin film was decreased but pyrochlore was formed with increasing Sr. In case of addition to substitute 0.4mol% Sr for Ba, dielectric constant was 288 and loss factor (tan $delta$) was 0.04.
Key words: Dielectric $(Ba_{1-x}Sr_x)TiO_3$ thin film, Transmittance, Perovskite, Tetragonality, Pyrochlore
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