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Journal of the Korean Ceramic Society 1995;32(3): 281. |
| 졸-겔법에 의한 $TiO_2$ 박막의 특성에 관한 연구 |
| 황규석, 김병훈 |
| 전남대학교 무기재료공학과 |
| A Study on the Characteristics of $TiO_2$ Thin Films by Sol-Gel Process |
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| ABSTRACT |
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to prepare the TiO2 thin films, acetyl-acetone(2.4-pentanedione)(1 : 1 molar ratio) was dissolved in the propanol solution of titanium(IV)isopropoxide(Ti[OCH(CH3)2]4). Al, Cr and Sb in the form of soluble salt and niobium ethoxide were added s dopants, respectively. Thin films were coated by the dip-coating method and characteristics were investigated by XRD, SEM and conductance meter. As a result, viscosity of sol was maintained below 4 centi Poise more than 20 days, and crystal growth and diminution of resistivity occurred as the heat treatment temperature increased. The grains grew over 1${mu}{textrm}{m}$ and the lowest resistivity was obtained when Nb was added at 130$0^{circ}C$. |
| Key words:
$TiO_2$ thin film, Soluble salt, Dip-coating, Crystal growth, Resistivity |
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