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J. Korean Ceram. Soc. > Volume 32(1); 1995 > Article
Journal of the Korean Ceramic Society 1995;32(1): 37.
화학 증착법에 의한 $TiO_2$ 초미분의 제조 및 입자 특성에 관한 연구
염선민, 이성호, 김광호
부산대학교 무기재료공학과
Synthesis and Characterization of $TiO_2$ Ultrafine Powder by Chemical Vapor Deposition
ABSTRACT
TiO2 fine powders were synthesized using oxygenolysis and hydrolysis reaction of TiCl4 vapor in gas phase. The TiO2 powder synthesized showed morphological differences depending on reaction system as follows: TiCl4-O2 reaction system produced the monosized particles having polyhedral shape with well-defined crystal planes and the particles did not agglomerate into secondary particles. TiCl4-H2O reaction system, whereas, produced the spherical secondary particles which consisted of fine primary particles. Other powder characteristics such as particle size, impurity content and rutile content are also reported in this study.
Key words: $TiO_2$, Ultrafine powder, CVD, Particle size, Rutile content
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