SHS화학로에 의한 SiC의 합성 |
김도경, 박성, 조건1, 이형복 |
명지대학교 무기재료공학과 1한국과학기술원 무기재료공학과 |
Synthesis of SiC by Self-Propagating High Temperature Synthesis Chemical Furnace |
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ABSTRACT |
Ultra-fine $beta$-SiC powders were fabricated by self-propagating high temperature synthesis process (SHS) using chemical furnace. The dependences of the C powders with different surface areas, the molar ratios of C/Si, the weight ratios of chemical fuel content, and pellet diameter-size on synthesis were investigated. Compositional and structural characterization of these powders was carried out by scanning electron micrograph and X-ray diffraction. The $beta$-SiC powders which had C/Si mole ratio=1.05, 3 times chemical fuel contents, and pellet diameter=20 mm were optimum for synthesis efficiency. By optimizing process-variables, it is possible to fabricate $beta$-SiC powders which have little secondary phases ($alpha$-SiC). |
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