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Journal of the Korean Ceramic Society 1994;31(11): 1315. |
| ITO/Glass 기판위에 제조된 강유전성 $PbTiO_3$ 박막의 특성 |
| 김승현, 오영제1, 김창은 |
연세대학교 세라믹공학과
1한국과학기술연구원 세라믹스연구부 |
| Properties of Ferroelectric $PbTiO_3$ Thin Films Prepared on ITO/Glass Substrates |
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| ABSTRACT |
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In this study, stable PbTiO3 coating solution was prepared using diethanolamine(DEA) complexing agent and deposited on indium-tin oxide(ITO) coated glass substrate. Prepared thin films were dense and crack-free. Perovskite-type PbTiO3 thin films could be obtained above 50$0^{circ}C$, while the films heat-treated above $650^{circ}C$ showed undesired properties due to interface reactions between films and substrates and warpage phenomena of substrates. Measured maximum dielectric constant and loss tangent were found to be 144 and 0.0163 at 1 kHz, 55$0^{circ}C$ heat-treatment, respectively. |
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