Preparation and Characterization of Bi-Sr-Ca-Cu-O Superconductor Thin Film by Metal Organic Chemical Vapor Deposition

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J. Korean Ceram. Soc. > Volume 31(10); 1994 > Article

Journal of the Korean Ceramic Society 1994;31(10): 1123.

MOCVD법을 이용한 Bi-2212계 초전도박막 제조 및 특성에 관한 연구

장건익, 김호인¹, 박인길, 김호기¹

한국과학기술원 전자세라믹 재료연구센터
¹한국과학기술원 무기재료공학과

Preparation and Characterization of Bi-Sr-Ca-Cu-O Superconductor Thin Film by Metal Organic Chemical Vapor Deposition

ABSTRACT

Bi-Sr-Ca-Cu-O superconductor thin films were prepared on MgO and LaAlO3 substrates by MOCVD technique. The films deposited on MgO and LaAlO3 substrates became superconducting at 64 K and 70 K respectively. The measured critical current density of thin film deposited on LaAlO3 substrate was around 104 A/$textrm{cm}^2$. After annealing at $700^{circ}C$ for 3 hours, the critical transition temperature(Tc) of films deposited on LaAlO3 was changed from 70 K to 74 K.