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J. Korean Ceram. Soc. > Volume 31(7); 1994 > Article
Journal of the Korean Ceramic Society 1994;31(7): 715.
Off-axis Sputtering 방법으로 제조한 $Bi_2Sr_2Ca_2Cu_3O_x$ 박막의 초전도상 생성에 관한 연구
심창훈, 양우석, 제정호
포항공과대학교 재료금속공학과
Study on the Formation of Superconducting Phases of $Bi_2Sr_2Ca_2Cu_3O_x$ Thin Films Prepared by Off-axis Sputtering
ABSTRACT
Off-axis supttering using shielder was used to efficiently prevent negative oxygen ions from resputtering deposited films. In this method, the substrate was located vertically to the target and shielded by the semicircled steel plate. By using this method, the resputtering could be reduced, and 2223 high-Tc phase could be formed at the lower substrate temperature and in the broader temperature region. As increasing the substrate temperature, 2212, 2223, 2212 superconducting phases were formed by turns. 2223 phase was formed above 2$times$10-2 torr, and 2212 phase was formed above 4$times$10-2 torr.
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