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J. Korean Ceram. Soc. > Volume 31(7); 1994 > Article
Journal of the Korean Ceramic Society 1994;31(7): 795.
솔-젤 회전 코팅법을 이용한 강유전성 $BaTiO_3$ 박막제조
배호기, 고태경
인하대학교 무기재료공학과
Preparation of Ferroelectric $Cr_3C_2$ Thin Film Using Sol-Gel Spin Coating Process
ABSTRACT
Ferroelectric BaTiO3 thin film was produced using BaTi-ethoxide sol. This sol was prepared from BaTi-ethoxide by a partial hydrolysis with ammonia as a basic catalyst and ethylene glycol as a chelating agent. BaTiO3 thin film was prepared from three continuous spin-coating layers of the sol on bare Si(100) wafer at 2500 rpm followed by pyrolysis at $700^{circ}C$ for 30 min. After the heat treatment, the film was 0.200$pm$0.010 ${mu}{textrm}{m}$ thick and its grain size was 0.059 ${mu}{textrm}{m}$. On the other hand, electrical properties were measured for BaTiO3 thin film separately prepared on Au-deposited silicon wafer. The dielectric constant and loss of the BaTiO3 thin film at room temperature was 150~160 and 0.04 respectively, which was measured at 10 kHz and oscillation level of 0.1 V. In the measurements of the dielectric properties at high temperatures, it was observed that the capacitance of the thin film increases steeply, while the dielectric loss reaches maximum around 1$25^{circ}C$, which corresponds a phase transition from tetragonal to cubic BaTiO3.
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