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J. Korean Ceram. Soc. > Volume 31(4); 1994 > Article
Journal of the Korean Ceramic Society 1994;31(4): 436.
분사증기법에 의해 형성된 ZnO 투명전도막에서 기판온도가 막 특성에 미치는 영향
이환수, 주승기
서울대학교 공과대학 금속공학과
Effect of Substrate Temperature on the Properties of ZnO Transparent conducting Thin Film Prepared by the Vapour Spraying Method
ZnO transparent conducting thin film, which is a strong candidate for a transparent electrical contact in optoelectronic devices, was prepared by the vapour spraying method on the slide glass in nitrogen ambient at the atmospheric pressure. The structural, optical and electrical properties of films show a strong dependence on substrate temperature, and the optimum range of deposition temperature existed to obtain TCO(Transparent Conducting Oxide) films. At the higher temperatures, milky films were obtained. In such optimum range, the bandgap in ZnO films was determined from the spectral dependence of absorption coefficient and electrical characteristics were characterized with by the Hall mobility and carrier concentration.
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