Preparation and Permeation Characteristics of Alumina Composite Membranes by CVD and Evaporation-Oxidation Process

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J. Korean Ceram. Soc. > Volume 30(8); 1993 > Article

Journal of the Korean Ceramic Society 1993;30(8): 678.

화학증착 및 증발-산화법에 의한 알루미나 복합분리막의 제조 및 투과특성

안상옥, 최두진, 현상훈, 정형진¹, 유광수¹

연세대학교 세라믹공학과
¹한국과학기술연구원 광전세라믹스연구실

Preparation and Permeation Characteristics of Alumina Composite Membranes by CVD and Evaporation-Oxidation Process

ABSTRACT

Alumina composite membranes were prepared by chemical vapor deposition and evaporation-oxidation process. For CVD process, deposition was carried out using aluminum-tri-isopropoxide at 35$0^{circ}C$, 2 torr by heterogeneous reaction, and for evaporation-oxidation process, alumina composite membranes were prepared by evaporation of aluminum and dry oxidation at 80$0^{circ}C$. As deposition time increases, water flux and N2 gas permeability of the composite membranes prepared by both processes were reduced. Applying gas permeation model, permeability and cracking possibility of top layer were evaluated.