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J. Korean Ceram. Soc. > Volume 29(12); 1992 > Article
Journal of the Korean Ceramic Society 1992;29(12): 990.
$SnCl_4-SbCl_5-H_2O$ 기체혼합물로부터 ATO(Antimony Tin Oxide) 박막의 화학증착에 관한 열역학 및 실험분석
김광호, 강용관, 이수원1
부산대학교 무기재료공학과
1현대전자(주) 반도체연구소 광소자연구실
Thermodynamical and Experimental Analyses of Chemical Vapor Deposition of ATO from SnCl4-SbCl5-H2O Gas Mixture
ABSTRACT
Chemical vapor deposition of ATO from SnCl4-SbCl5-H2O gas mixture was investigated with thermodynamic and experimental analyses. Electrical conductivity of the ATO film was much improved under deposition conditions of low input-gas ratio, Psbcl5/Psbcl4. This increase of the conductivity was attributed to donor electrons produced mainly by the pentavalent Sb ions in SnO2 lattice. However high input-gas ratio conditions produced an ATO film consisting of a mixture of SnO2 and very fine Sb2O5 phase. It was found that the deterioration of electrical conductivity and optical transmission of the film was caused by the deposition of fine Sb2O5 phase in the SnO2 matrix.
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