Preparation and Characterization of Fine <TEX>$TiO_2$</TEX> Powders by Vapor-Phase Hydrolysis of TiCl4

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J. Korean Ceram. Soc. > Volume 29(7); 1992 > Article

Journal of the Korean Ceramic Society 1992;29(7): 525.

사염화티타늄의 기상가수분해반응에 의한 $TiO_2$ 미분의 제조 및 입자특성

염선민, 김광호, 신동원¹, 박찬경¹

부산대학교 무기재료공학과
¹포항공과대학 재료금속공학과

Preparation and Characterization of Fine $TiO_2$ Powders by Vapor-Phase Hydrolysis of TiCl4

ABSTRACT

TiO2 fine powder was synthesized in the gas phase by chemical vapor deposition using hydrolysis of TiCl4. Content of rutile phase in the powder was investigated. Powder characteristics such as size, crystallinity and morphology were also studied by means of TEM, SEM and XRD. Rutile phase in TiO2 powder started to be formed from 100$0^{circ}C$ and the content increased with the reaction temperature and TiCl4 concentration. As the temperature increased from 80$0^{circ}C$ to 140$0^{circ}C$, the primary particle size increased while secondary particle size decreased. Spherical secondary particle with fine primary crystals agglomerated was produced at low temperature of 80$0^{circ}C$ whereas the grown primary particle being final particle size was produced at higher temperature of 140$0^{circ}C$. Other effects of TiCl4 and H2O partial pressures on particle size were also reported in this study.