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J. Korean Ceram. Soc. > Volume 29(5); 1992 > Article
Journal of the Korean Ceramic Society 1992;29(5): 383.
RF Magnetron Sputtering에 의해 증착된 Ni-Zn-Cu Ferrite 박막의 물성에 미치는 기판온도의 영향
공선식, 조해석, 김형준, 김경용1
서울대학교 무기재료공학과
1한국과학기술연구원 세라믹스연구단
Effects of the Substrate Temperature on the Properties of Ni-Zn-Cu Ferrite Thin Films Deposited by RF Magnetron Sputtering
ABSTRACT
We investigated the effect of substrate on the properties of the Ni-Zn-Cu ferrite thin films deposited on SiO2 (1000∼3000${AA}$) / Si (100) substrate at various conditions by rf magnetron sputtering. A disktype Ni-Zn-Cu ferrite sintered by conventional ceramic process and argon gas were used as a target and a sputtering gas, repectively. The compositions of the thin films measured by EPMA were similar to target composition (Fe: 65.8 at%, Ni: 12.7 at%, Cu: 6.7 at%, Zn: 14.8 at%) irrespective of substrate temperature. Amorphous thin films were deposited when substrate was not intentionally heated, but the films came to crystallize with increasing substrate temperature, and crystalline thin films were deposited at substrate temperature above 200$^{circ}C$. Below 250$^{circ}C$ saturation magnetization (Ms), remanence (Mr) and coercivity (Hc) of the ferrite thin film increased with the substrate temperature due to the increase of grain size and the improvement of crystallinity. And above 250$^{circ}C$, Ms, Mr increased slightly, but Hc of the amorphous thin films increased due to crystallization, whereas that of the crystalline thin films decreased because of grain growth and stress release.
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