Electrical and Optical Properties of Sb-doped SnO2 Films Prepared by Chemical Vapor Deposition

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J. Korean Ceram. Soc. > Volume 29(4); 1992 > Article

Journal of the Korean Ceramic Society 1992;29(4): 319.

화학증착법에 의해 제조된 Sb-doped $SnO_2$ 박막의 전기적 및 광학적 특성

이수원, 김광호

부산대학교 무기재료공학과

Electrical and Optical Properties of Sb-doped SnO2 Films Prepared by Chemical Vapor Deposition

ABSTRACT

Sb-doped SnO2 films were formed on Corning glass 7059 substrate by chemical vapor deposition using simulataneous hydrolysis of SnCl4 and SbCl5. Fairly good transparent conducting film with a low resistivity of ~6$times$10-4{{{{ OMEGA }}cm and high average optical transparency above ~85% in the range of visible light was obtained at the deposition condition of 50$0^{circ}C$ and input-gas ratio, [Psbcl5/Psncl4] of 0.05. Film conductivity was improved without loosing optical transparency at light doping of Sb and found to be due to the increase of electron concentration. However, high doping of Sb into SnO2 film largely deteriorated conductivity, optical transparency and crystallinity of the film.