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J. Korean Ceram. Soc. > Volume 28(12); 1991 > Article
Journal of the Korean Ceramic Society 1991;28(12): 943.
졸-겔법에 의한 PZT 합성과 박막제조
오영제, 정형진
한국과학기술연구원 세라믹스재료연구단
Sol-Gel Processing and Properties of PZT Powders and Thin Films
ABSTRACT
Lead zirconate titanate(PZT) powders and thin films were prepared from an alkoxide-based solution by sol-gel method. Gelation of synthesized complex solutions, pyrolysis and crystallization behaviors of the dried powder were studied in accordance with a water content and a catalyst. PZT thin films were formed by spin-casting method on silicon and platinum substrates, and characterized. Ester produced from the reactions was completely removed when drying of the gel was finished. Pyrolysis property of the dried PZT gels were changed in order water content, class of catalyst, and quantity of catalyst. Crystalline Pb phase was transiently formed near 250$^{circ}C$. Basic catalyst is good additive for a formation of perovskite phase in the films, and acidic catalyst for a densified film structure. By the analysis of RBS, Pb element in the PZT films were diffused into silicon substrate, and the pores, may be produced due to local densification around some grains in the films, make an origin of fault in microstructure when holding time goes to be longer at 700$^{circ}C$.
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