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J. Korean Ceram. Soc. > Volume 28(11); 1991 > Article
Journal of the Korean Ceramic Society 1991;28(11): 859.
졸겔 스핀 코팅에서 질산촉매가 티탄산연 박막의 물성에 미치는 영향
이전국, 정형진, 김종희1
한국과학기술연구원 세라믹스부
1한국과학기술원 재료공학부
The Effect of Nitric Acid Catalyst on the Properties of Lead Titanate Thin Films by Sol Gel Spin Coating
ABSTRACT
High quality lead titanate thin films were fabricated by spin coating on a silicon substrate. The resulting dried gel layers were uniform in thickness through 2$times$2 $textrm{cm}^2$ area, and polycrystalline perovskite structures developed almost crack free with a heat treatment above 50$0^{circ}C$ in films with thickness above 360 nm. Metastable pyrochlore structures were observed in films with thickness of 160 nm when heat treated at 500 and $600^{circ}C$, but these structure did not appear in films with thickness of 360 nm. The thickness dependence in crystal structure of films was studied. by varying the substrate condition and analyzing the interface between the film and substrate. In native oxide films on silicon stbstrates, amorphous dried gel layers were heterogeneously nucleated. Metastable cubic pyrochlore structure could be crystallized in amorphous native oxide.
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