양극 산화법으로 제조된 Tantalum Oxide 박막의 전압-시간 특성과 미세구조와의 연관성 |
정형진, 윤상옥1, 이동헌 |
한국과학기술원 세라믹스부 1강릉대학교 재료공학과 |
Relationship Between Voltage-time Characteristics and Microstructures of Tantalum Oxide Thin Films Prepared by Anodic Oxidation |
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ABSTRACT |
Microstructures of tantalum oxide, anodic-oxidized in oxalic acid, are shown to be related to voltage-time characteristics during formation reaction. It is observed that a crystalline phase transformed from an amorphous phase is recrystallized in the presence of the high electric field within the film, and this recrystallized film has a very porous microstructure. From the results of the XRD, the nonlinearity observed after the first spark voltage is recognized to be due to the local crystallization. |
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