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J. Korean Ceram. Soc. > Volume 25(4); 1988 > Article
Journal of the Korean Ceramic Society 1988;25(4): 380.
Air 분위기에서 규소성형체의 질화반응
최석홍, 안영필
한양대학교 무기재료공학과
Nitridation of Silicon Powder Compacts in Air
ABSTRACT
This investigation includes nitridation phenomena of silicon powder compacts in air. Nitridation reaction condition has been provided with using silicon nitride bed and active carbon additive. Reaction products are Oxynitride, $alpha$-Si3N4, and $beta$-Si3N4, Oxynitride(Si2N2O) phase in formed at outer surface layer ofsilicon powder compacts. $alpha$-Si3N4, and $beta$-Si3N4 are formed at inner region of powder compacts. Microstructural observation indicates that nitridation mechanism in this work is the same as conventional nitridation mechanism nitrogen gas.
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