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J. Korean Ceram. Soc. > Volume 22(6); 1985 > Article
Journal of the Korean Ceramic Society 1985;22(6): 87.
진공증착법에 의한 산화철박막의 제조 및 전기적특성
조경형, 오재희
인하대학교 공과대학 무기재료공학과
Preparation of Iron Oxide Thin Films by Vacuum Evaporation Method and Its Electrical Properties
The hematite the magetite and the maghemite thin film were prepared by oxidation and reductino of the vaccum-evaporated iron thin film. Interre;atoms between film preparation process and the electrical properties were investigated. At room temperature the electrical conductivity of the iron the hematite the magnetite and the maghemite thin film were $1{times}10^4Omega^{-1}cm^{-1}$, 2{times}10^{-5}Omega^{-1}cm^{-1}$, $3{times}10^{-5}Omega^{-1}cm^{-1}$, and $4{times}10^{-5}Omega^{-1}cm^{-1}$, resp-ectively. The surface of each thin film was dense and homogeneous. At the temperature that the iron thin film was converted into the hematite thin film the electrical conductivity decreased rapidly and the electrical con-ductivity of the hematite thin film increased as temperature increased. The hematite thin film was reduced to the magnetite thin film in H2 atmosphere. The electrical conductivity decreased rapidly at the temperature that the maghemite thin film is formed by oxidation of the magnetite thin film and the electrical conductivity of the maghemite thin film increased as temperature increased.
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