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Journal of the Korean Ceramic Society 1985;22(2): 51. |
Vertical Bridgman-Stockbarger법에 의한 Silicon 단결정 성장 |
심광보, 오근호 |
한양대학교 무기재료공학과 |
Silicon Single Crystal Growth by Vertical Bridgman-Stockbarger Method |
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ABSTRACT |
Silicon single crystals were grown bynon-seeded vertical Brdgmen-Stockbarger technique. Optimum growth rate appeared 5mm/hr in the system. It was identified that the preferential orientation using by the optical microscope resulted in <100> direction. |
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