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J. Korean Ceram. Soc. > Volume 20(2); 1983 > Article
Journal of the Korean Ceramic Society 1983;20(2): 166.
Tumbling Bed에서 화학증착법에 의해 증착되는 열분해탄소의 특성에 미치는 Silicon-Alloying의 효과
윤영진, 이재영
한국과학기술원 재료공학과
The Effect of Silicon-Alloying on the Characteristics of the Pyrolytic Carbonds Deposited in Tumbling Bed by CVD
ABSTRACT
In this study the sillicon-alloyed isotropic pyrolytic carbon was deposited in the tumbling bed from the pyrolysis of propane and silicon tetrachloride and investigated whether the silicon-alloyed isotropic pyrolytic carbon deposited in this study was usable as bionaterial or not. The silicon-allyed isotropic pyrolytic carbon was varied by controlling the process variables such as propane con-concentration and the argon flow rate flowing in to the silicon tetrachloride bubbler at a fixed reaction bed tempera-ture of 120$0^{circ}C$ a rotation of reaction tube of 40 rpm a bed particle weight of 7.5 g and a total flow rate of 21/min; the propane concentration was varied from 10 to 70 and the argon flow rate flowing into the silicon tetrachloride bubble from 0 to 1000 cc/min. The results show that the silicon-alloyed isotropic pyrolytic carbon was obtained at all conditions investigated, . And then the alloyed silicon content is rangion from 7 to 14.5 wt%. The density and deposition rate of deposited silicon-alloyed isotropic carbon increased axxording to silicon content and propane concentration. And the apparent crystal-size(Lc) of pyrolytic carbon is not changed with silicon content. The density and apparant crystallite size are respec-tively in the range of 1.94 to 2.06 and 20 to 25$AA$ It is shown that the silicon-alloyed isotropic pyrolytic carbon ob-tained in this experiment is usable as biomaterial.
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