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J. Korean Ceram. Soc. > Volume 46(5); 2009 > Article
Journal of the Korean Ceramic Society 2009;46(5): 456.
doi: https://doi.org/10.4191/kcers.2009.46.5.456
불소계 플라즈마에 노출된 YAG 세라믹스의 식각거동 및 XPS 분석
김경범, 김대민, 이정기1, 오윤석, 김형태, 김형순1, 이성민
한국세라믹기술원 이천분원 엔지니어링세라믹센터
1인하대학교 신소재공학부
Erosion Behavior of YAG Ceramics under Fluorine Plasma and their XPS Analysis
Kyeong-Beom Kim, Dae-Min Kim, Jung-Ki Lee1, Yoon-Suk Oh, Hyung-Tae Kim, Hyung-Sun Kim1, Sung-Min Lee
Korea Institute of Ceramic Engineering and Technology(Icheon)
1School of Materials Engineering, Inha University
ABSTRACT
Chemical composition and status of chemical bonding of the YAG($Y_3Al_5O_{12}$) ceramics after the exposure to fluorine plasma have been investigated using X-ray photoelectron spectroscopy, with the analysis on its erosion behavior. On the surface, F showed the maximum content, decreasing with depth, meanwhile the cation composition remained almost constant, irrespective of the position. The peaks due to Y in the reaction layer consisted of two kinds, showing the Y-O and Y-F bonds. These surface modifications under fluorine plasma seem to promote the erosion of the YAG ceramics. Excess addition of $Al_2O_3$ or $Y_2O_3$ into stoichiometric YAG produced 2nd phases of $Al_2O_3$ and $YAlO_3$, respectively, resulting in the slight difference in the local erosion rates. But, the overall average erosion rate was not sensitive to such excess additions of $Al_2O_3$ or $Y_2O_3$.
Key words: YAG($Y_3Al_5O_{12}$), Plasma resistance, Erosion, X-ray photoelectron spectroscopy
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