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J. Korean Ceram. Soc. > Volume 41(1); 2004 > Article
Journal of the Korean Ceramic Society 2004;41(1): 30.
doi: https://doi.org/10.4191/kcers.2004.41.1.030
스크린 인쇄법에 의해 제조한 PMW-PZT 후막의 특성
손진호, 김용범1, 천채일2, 유광수3, 김태송1
서울시립대학교 재료공학과, 한국과학기술연구원
1한국과학기술연구원 마이크로시스템연구센터
2호서대학교 신소재공학과
3서울시립대학교 재료공학과
Characterization of PMW-PZT Thick Films Prepared by Screen Printing Method
Jin-Ho Son, Yong-Bum Kim1, Chae-Il Cheon2, Kwang-Soo Yoo3, Tae-Song Kim1
Department of Materials Science and Engineering, The University of Seoul, KIST
1Microsystem Research Center, Korea Institute of Science and Technology
2Department of Materials and Mechanical Engineering, Hoseo University
3Department of Materials Science and Engineering, The University of Seoul
PMW-PZT thick films of about $30{mu}m$ thickness were fabricated on Pt/$TiO_2$/$SiN_x$Si substrate by the hybrid method of screen printing and PZT sol application. With the increase of the number of the sol application times, the sintered density and electrical properties of PMW-PZT thick films were evidently increased. For the PMW-PZT thick film with PZT sol application of 10-times, the dielectric constant ($varepsilon_r$) was 745 at the frequency of 100 KHz and thepiezoelectric coefficient ($d_33$) was 155 pC/N at the applied pressure of 1 atm.
Key words: PMW-PZT, Piezoelectric, Thick film, Screen printing, PZT sol application
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