Anode Characteristics of Tin Oxide Thin Films According to Various Si Additions for Lithium Secondary Microbattery

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doi:2003.40.1.69

J. Korean Ceram. Soc. > Volume 40(1); 2003 > Article

Journal of the Korean Ceramic Society 2003;40(1): 69.
doi: https://doi.org/10.4191/kcers.2003.40.1.069

Si 첨가에 따른 리튬 이차 박막 전지용 주석 산화물 박막의 음극 특성

박건태, 박철호, 손영국

부산대학교 무기재료공학과

Anode Characteristics of Tin Oxide Thin Films According to Various Si Additions for Lithium Secondary Microbattery

ABSTRACT

For lithium secondary microbattery anode, the tin oxide thin films with Si addition (0, 2, 6, 10, 20 ㏖%) were prepared with R.F. magnetron sputtering at substrate temperature of 30$0^{circ}C$ and Ar:O$_2$=7:3 atmosphere. As Si addition amount increased, Si-O bonding density increased and Sn-O bonding density decreased. The addition of optimum Si amount led the decrease of Sn oxidation state so that the irreversible capacity reduced and cycle characteristic enhanced during charge-discharge test. SnO$_2$films with 6 ㏖% Si had the highest reversible capacity of 700 mAh/g after 100 cycles.

Key words: $SnO_2$, R.F. magnetron sputtering, Lithium secondary battery