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Optimization of the Material and Structure of Component Parts for Reducing the Number of Impurity Particles in CVD Process
Won Kyung Kim, Ram Woo, Jong Wook Roh
J. Korean Ceram. Soc.. 2019;56(3):277-283.   Published online 2019 May 23    DOI: https://doi.org/10.4191/kcers.2019.56.3.03

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Optimization of the Material and Structure of Component Parts for Reducing the Number of Impurity Particles in CVD Process
Journal of the Korean Ceramic Society. 2019;56(3):277-283   Crossref logo
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