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Crystal Structure, Microstructure and Mechanical Properties of NbN Coatings Deposited by Asymmetric Bipolar Pulsed DC Sputtering |
Sung-Yong Chun, Hyun-Ho Im |
J. Korean Ceram. Soc.. 2017;54(1):33-37. Published online 2017 January 31 DOI: https://doi.org/10.4191/kcers.2017.54.1.02 |
Crystal Structure, Microstructure and Mechanical Properties of NbN Coatings Deposited by Asymmetric Bipolar Pulsed DC Sputtering Investigation of the adhesion of NbN coatings deposited by pulsed dc reactive magnetron sputtering using scratch tests Reactive sputtering of hard nitride coatings using asymmetric-bipolar pulsed DC generator Structural and optical properties of diamond like thin films deposited by asymmetric bipolar pulsed-DC reactive magnetron sputtering Structure and mechanical properties of δ-NbN/SiNx and δ′-NbN/SiNx nano-multilayer films deposited by reactive magnetron sputtering Structure and properties of Ti films deposited by dc magnetron sputtering, pulsed dc magnetron sputtering and cathodic arc evaporation Microstructure Analysis of TaN/Cu Nanocomposite Coatings Deposited by Pulsed DC Magnetron Sputtering Nitrogen incorporation into boron carbide films deposited by dc-magnetron sputtering: film microstructure and tribological properties Structure and properties of CrSiN nanocomposite coatings deposited by hybrid modulated pulsed power and pulsed dc magnetron sputtering The structure and properties of chromium nitride coatings deposited using dc, pulsed dc and modulated pulse power magnetron sputtering |
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