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Crystal Structure, Microstructure and Mechanical Properties of NbN Coatings Deposited by Asymmetric Bipolar Pulsed DC Sputtering

Sung-Yong Chun, Hyun-Ho Im

J. Korean Ceram. Soc.. 2017;54(1):33-37. Published online 2017 January 31 DOI: https://doi.org/10.4191/kcers.2017.54.1.02

Crystal Structure, Microstructure and Mechanical Properties of NbN Coatings Deposited by Asymmetric Bipolar Pulsed DC Sputtering

Sung-Yong Chun, Hyun-Ho Im

Journal of the Korean Ceramic Society. 2017;54(1):33-37

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Structural and optical properties of diamond like thin films deposited by asymmetric bipolar pulsed-DC reactive magnetron sputtering

M. Rubio-Roy, E. Pascual, M.C. Polo, J.L. Andújar, E. Bertran

Surface and Coatings Technology. 2008;202(11):2354-2357

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Investigation of the adhesion of NbN coatings deposited by pulsed dc reactive magnetron sputtering using scratch tests

Yasar Totik

Journal of Coatings Technology and Research. 2009;7(4):485-492

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Structure and mechanical properties of δ-NbN/SiNx and δ′-NbN/SiNx nano-multilayer films deposited by reactive magnetron sputtering

M. Wen, Q.N. Meng, C.Q. Hu, T. An, Y.D. Su, W.X. Yu, W.T. Zheng

Surface and Coatings Technology. 2009;203(12):1702-1708

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Reactive sputtering of hard nitride coatings using asymmetric-bipolar pulsed DC generator

Harish C. Barshilia, K.S. Rajam

Surface and Coatings Technology. 2006;201(3-4):1827-1835

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Structure and properties of CrSiN nanocomposite coatings deposited by hybrid modulated pulsed power and pulsed dc magnetron sputtering

Jianliang Lin, Bo Wang, Yixiang Ou, William D. Sproul, Isaac Dahan, John J. Moore

Surface and Coatings Technology. 2013;216:251-258

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Effects of sputtering gas on the microstructure of Ir thin films deposited by HiPIMS and pulsed DC sputtering

S. Zenkin, A. Gaydaychuk, S. Linnik

Surface and Coatings Technology. 2021;412:127038

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The mechanical properties evaluation of the CrN coatings deposited by the pulsed DC reactive magnetron sputtering

Jyh-Wei Lee, Shih-Kang Tien, Yu-Chu Kuo, Chih-Ming Chen

Surface and Coatings Technology. 2006;200(10):3330-3335

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Microstructure and mechanical properties of W-C:H coatings deposited by pulsed reactive magnetron sputtering

Andrzej Czyżniewski, Witold Gulbiński, György Radnóczi, Marianna Szerencsi, Mieczysław Pancielejko

Surface and Coatings Technology. 2011;205(19):4471-4479

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Microstructure, mechanical and tribological properties of Cr–C–N coatings deposited by pulsed closed field unbalanced magnetron sputtering

Z.L. Wu, J. Lin, J.J. Moore, M.K. Lei

Surface and Coatings Technology. 2009;204(6-7):931-935

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