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Crystal Structure, Microstructure and Mechanical Properties of NbN Coatings Deposited by Asymmetric Bipolar Pulsed DC Sputtering
Sung-Yong Chun, Hyun-Ho Im
J. Korean Ceram. Soc.. 2017;54(1):33-37.   Published online 2017 January 31    DOI: https://doi.org/10.4191/kcers.2017.54.1.02

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Crystal Structure, Microstructure and Mechanical Properties of NbN Coatings Deposited by Asymmetric Bipolar Pulsed DC Sputtering
Journal of the Korean Ceramic Society. 2017;54(1):33-37   Crossref logo
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Structural and optical properties of diamond like thin films deposited by asymmetric bipolar pulsed-DC reactive magnetron sputtering
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Structure and mechanical properties of δ-NbN/SiNx and δ′-NbN/SiNx nano-multilayer films deposited by reactive magnetron sputtering
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Structure and properties of CrSiN nanocomposite coatings deposited by hybrid modulated pulsed power and pulsed dc magnetron sputtering
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Effects of sputtering gas on the microstructure of Ir thin films deposited by HiPIMS and pulsed DC sputtering
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Microstructure, mechanical and tribological properties of Cr–C–N coatings deposited by pulsed closed field unbalanced magnetron sputtering
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