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Crystal Structure, Microstructure and Mechanical Properties of NbN Coatings Deposited by Asymmetric Bipolar Pulsed DC Sputtering

Sung-Yong Chun, Hyun-Ho Im

J. Korean Ceram. Soc.. 2017;54(1):33-37. Published online 2017 January 31 DOI: https://doi.org/10.4191/kcers.2017.54.1.02

Crystal Structure, Microstructure and Mechanical Properties of NbN Coatings Deposited by Asymmetric Bipolar Pulsed DC Sputtering

Sung-Yong Chun, Hyun-Ho Im

Journal of the Korean Ceramic Society. 2017;54(1):33-37

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Investigation of the adhesion of NbN coatings deposited by pulsed dc reactive magnetron sputtering using scratch tests

Yasar Totik

Journal of Coatings Technology and Research. 2009;7(4):485-492

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Reactive sputtering of hard nitride coatings using asymmetric-bipolar pulsed DC generator

Harish C. Barshilia, K.S. Rajam

Surface and Coatings Technology. 2006;201(3-4):1827-1835

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Structural and optical properties of diamond like thin films deposited by asymmetric bipolar pulsed-DC reactive magnetron sputtering

M. Rubio-Roy, E. Pascual, M.C. Polo, J.L. Andújar, E. Bertran

Surface and Coatings Technology. 2008;202(11):2354-2357

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Structure and mechanical properties of δ-NbN/SiNx and δ′-NbN/SiNx nano-multilayer films deposited by reactive magnetron sputtering

M. Wen, Q.N. Meng, C.Q. Hu, T. An, Y.D. Su, W.X. Yu, W.T. Zheng

Surface and Coatings Technology. 2009;203(12):1702-1708

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Structure and properties of Ti films deposited by dc magnetron sputtering, pulsed dc magnetron sputtering and cathodic arc evaporation

Chao Yang, Bailing Jiang, Zheng Liu, Juan Hao, Lin Feng

Surface and Coatings Technology. 2016;304:51-56

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Microstructure Analysis of TaN/Cu Nanocomposite Coatings Deposited by Pulsed DC Magnetron Sputtering

T. Elangovan, D. Mangalaraj, K. Prabakar, P. Kuppusami, Shabana Khan, E. Mohandas

Advanced Materials Research. 2010;123-125:427-430

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Nitrogen incorporation into boron carbide films deposited by dc-magnetron sputtering: film microstructure and tribological properties

D.C Reigada, F.L Freire

Surface and Coatings Technology. 2001;142-144:889-893

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Structure and properties of CrSiN nanocomposite coatings deposited by hybrid modulated pulsed power and pulsed dc magnetron sputtering

Jianliang Lin, Bo Wang, Yixiang Ou, William D. Sproul, Isaac Dahan, John J. Moore

Surface and Coatings Technology. 2013;216:251-258

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The structure and properties of chromium nitride coatings deposited using dc, pulsed dc and modulated pulse power magnetron sputtering

Jianliang Lin, John J. Moore, William D. Sproul, Brajendra Mishra, Zhili Wu, Jun Wang

Surface and Coatings Technology. 2010;204(14):2230-2239

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