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Microstructure and Electrical Properties of ZnO Thin Film for FBAR with Annealing Temperature
Bong-Seok Kim, Young-Hun Kang, Yu-Hyuk Cho, Eung-Kwon Kim, Jong-Joo Lee, Young-Sung Kim
J. Korean Ceram. Soc.. 2006;43(1):42    DOI: https://doi.org/10.4191/kcers.2006.43.1.042

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