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Silicidation of Co/M/(100) Si bilayer Structures |
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J. Korean Ceram. Soc.. 1998;35(5):505 |
Silicidation Mechanism of Co/(Refractory-Metal) Bilayer and Epitaxial Growth of CoSi2 on Si(100) Substrate Silicidation of Titanium-Rich Titanium Boride Deposited by Co-Sputtering on Si (100) Annealing of the Co/Hf bilayer on single Si, polycrystalline Si and SiO2 Phase Transformation of Co Silicidation in the Co/Ti- and Ti/Co-Si(100) Systems Silicidation behaviors of Co/Ti and Co/Hf bilayers on doped polycrystalline Si substrate Epitaxial cobalt silicide formation using a Co/TiSix bilayer on Si (100) by sputtering Phase and structure transformations in the titanium interlayer during the nickel silicidation on Si(100) substrate Ni(Pt) alloy silicidation on (100) Si and poly-silicon lines Direct Silicidation of Co on Si by Rapid Thermal Annealing Co surface modification by bias sputtering in Cu/Co(Vb)/NiO/Si(100) magnetic multilayer structures |
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