Initial Reaction of Hexachlorodisilane on Amorphous Silica Surface for Atomic Layer Deposition Using Density Functional Theory
Ki-Young Kim, Jin-Hoon Yang, Dong-Gung Shin, Yeong-Cheol Kim
J. Korean Ceram. Soc. 2017;54(5):443-447.   Published online 2017 Sep 29     DOI: https://doi.org/10.4191/kcers.2017.54.5.11
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